Department of Mechanical Engineering

Metrology Laboratory

Topography measurement	3D surface data with optional Y feed
Patented	Linear motor technology
Expandable	Contour measuring tasks
Model	Surfcom 1500
Power Source/ Power Consumption	Single phase AC100-240V+-10% grounding required, 50/60 Hz / 7670VA
Measuring Range (Z-Axis vertical)	1000 micron

Max. measuring diameter	Φ 300 mm
Up/down feed range (Z-axis)	300 mm
Radial feed range (R-axis)	180 mm
Max. loading diameter	Φ 580 mm
Max.measuring height	300 mm
Rotation accuracy Radial direction height (mm)	(0.02 + 3.2 H/10,000) μm (Gaussian 15 UPR)
Rotation accuracy Axis direction radius (mm)	(0.02 + 3.2 R/10,000) μm (Gaussian 15 UPR)
Straightness accuracy Up/down direction (Z-axis)	0.10 μm/100 mm 0.15 μm/300 mm
Straightness accuracy Radial direction (R-axis)	0.7 μm/180 mm
Parallelism accuracyUp/down direction (Z-axis)	0.7 μm/300 mm
Perpendicularity accuracyRadial direction (R-axis)	1.0 μm/150 mm
Rotation speed (T-axis)	Max: 20/min 1 to 10/min(Rotational measurement)0.01 to 1/min(Roughness measurement)
Up/down direction speed (Z-axis)	Max: 60 mm/s 0.5 to 10 mm/s (Rectilinear measurement)0.1 to 1.5 mm/min (Roughness measurement)
Radial direction speed (R-axis)	Max 30 mm / s0.5 to 10 mm/s (Rectilinear measurement)0.1 to 1.5 mm/min (Roughness measurement)
Rotary table Table outside diamete	Φ 235 mm
Rotary table Adjustment range of centering / tilting	±5 mm/±1°
Max. load capacity	300 N
Measuring range	±1000 μm, ±200 μm
Special function	Offset type CNC detector holder (Optional)
Power supply (Voltage to be specified)	AC 100 V to 240 V, 50/60 Hz (Grounding required)
Installation dimensions (W x D x H)	720 × 580 × 895 mm
Weight (except options)	180 kg

Type according to ISO 10360-1:2000	O-INSPECT 5/4/3 Fixed bridge CMM
Operating mode	Motorized / CNC
Sensors	ZEISS VAST XXT (contact)/ ZEISS Discovery.V12 (optical)
Travel speed Motorized Axes	0 to 100 in mm/s
Travel speed CNC X, Y, Z Axes	300/300/100 in mm/s
Travel speed CNC Vector	435 in mm/s
Acceleration X, Y, Z Axes	500/500/500 in mm/s2
Acceleration Vector	866 in mm/s2
Camera	ZEISS Discovery V12
Measuring volume	500 x 400 x 300 mm3
Repeatability range	1.2 in μm
Field of view	Min 16.1x12.0 mm2Max 1.3x1.0 mm2
Length measurement error MPE(E)	in 1D 1.4 µm + L/250 µmin 2D 1.6 µm + L/250 µmin 3D 1.9 µm + L/250 µm
Software	Calypso

Model	- STM7
Brand	- Rigaku
Focus	- Motorized/Manual
Stroke	- 175 mm (Small frame, Middle frame),145 mm*2(Large frame)
Frame Available	- Small frame, Middle frame, large frame
Optical System	- UIS2 Optical System (Infinity-corrected)